Thin Film Deposition

Our Thin Film Deposition equipment includes three RF-Magnetron Sputter deposition systems suitable for controlled deposition and vacuum annealing of a range of dielectric, metal and phosphor materials, annealing at temperatures up to 700°C with substrate size - 100mm diameter or smaller.

Typical materials deposited:

  • thin film phosphors for displays and sensors
    • ZnS:Mn
    • SrS:Cu,Ag
    • Y2O3:Eu
    • ZnS:Ag
    • ZnO
  • Dielectrics
    • Y¬2O3
    • SiN
  • Transparent Conductors
    • ITO
    • SnO:Sb
    • (Aluminium metal can be deposited by thermal evaporation)

To discuss your specific requirements in detail, please contact Gordon Arnott at SS2i or call us on +44(0)115 848 8665

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Last modified on: Monday 13 December 2010

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